HOGEN® hydrogen generation systems are well-suited to provide ultra high purity hydrogen for silicon semiconductor and MOCVD processes. They produce hydrogen at 200 psig or higher withour mechanical compression for consistent composition and predictable low levels of oxygen and nitrogen. The hydrogen is available at sufficient pressure to be purified through a palladium or chemical purifier to prevent contaminant reactions.
As compared with the need for high pressure liquid hydrogen tanks, or compressed gas storage, HOGEN® hydrogen generators are a safer, process-friendly, less complex, and productivity enhancing approach to supplying hydrogen for electronic applications.
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